摘要 介绍了近十几年特别是近几年来微泵研究的最新成果,根据有无可动阀及不同的驱动方式,比较系统地介绍了压电驱动微泵、静电驱动微型泵、双金属驱动微泵、形状记忆合金薄膜驱动微泵、热驱动薄膜微泵、收缩-扩张型微泵、电液动力微泵(E H D泵)、热驱动型微泵、热气致动微泵、基于粘性的微泵、双膜微泵、磁动力微泵等各种微泵的结构、原理、应用情况,展望了微泵的发展前景.
Abstract：The latest development in Micropump is introduced,which includes bothvalve and valveless type of micropump, such as piezoelectric micropump,static electricmicropump, double metal micropump, shape-memorized alloy film micropump, EHD micropump,thermo-pneumatic micropump, viscidity-based micropump, double-filmed micropump, magnetohydro dynamic(MHD) micropump and so on. The structure, mechanism and application areprovided. In the end the prospect of micropump is predicted.
王秀红. 微泵研究进展[J]. 排灌机械工程学报, 2003, 21(1): 5-8.
WANG Xiu-hong. Development in Micropump. Journal of Drainage and Irrigation Machinery Engin, 2003, 21(1): 5-8.
[1] Walter Lang.Reflexions on the future of Microsystems[J].Sensors and Actuators,1999,72:1-15[2] 陈迪,等.三维微加式新技术--DEM技术[J].微米/纳米科学与技术,1999,4(1):28-31[3] Olsson Anders,Larsson Olle,Holm Johan.Valve-less deffuser micropumps fabricated using thermoplastic replication[J].Sensors and Actuators,1998,A64:63-68[4] Bohm Sebastian,Olthuis Wouter,Berveld Piet.A Plastic micro-pump constructed with conventional techniques and materials[J].Sensors and Actuators,1999,A77:223-228[5] Smits JG.Piezoelectric Micro-pump with three valves working peristaltically[J].Sensors and Actuators,1989,20:203-206[6] Van Lintel H T G,et al.A piezoelectric micropump based on micro-machining of silicon[J].Sensors and Actuators,1988,15:153-167[7] Park Jung-Ho,Yoshida Kazuhiro,Yokota Shinichi.Resonantly driven piezoelectrtic micropump:Fabrication of a micropump having high power density[J].MECHATRONICS,1999,9:687-702[8] 徐东,等.形状记忆合金/硅复合膜驱动的微型泵[J].微细加工技术,2000,4:50-55[9] 尹执中,等.热驱动微泵的实验研究[J].功能材料与器件学报,2000,6(2):65-70[10] Van de Pol F C M,Wonnink D G J,Elwenspock M.A thermopneumatic actu-ation principle for a microminiature pump and other micro-mechanical devices[J].Sensors and Actuators,1989,17:139[11] Ok Chan Jeong,Sang Sik Yang.Fabrication and test of a thermopneumatic micropump with a cor-rugated p+diaphragm[J].Sensors and Actuators,2000,83:249-255[12] Smits JG.Piezoelectric Micropump with three valves working peristaltically[J].Sensors and Actuators,1989,20:203-206[13] L HUANG,W Wang,M C Murphy.LIGA fabrication and test of a DC type magnetohydro dynamic(MHD)micropump[J].Microsystem Technologies,2000,6(6):235-240[14] Lemoff Asuncion V,Lee Abraham P.An AC magnetohydrodynamic micropump[J].Sensors and Actuators,2000,63:178-185[15] Jang Jaesung,Lee Seung S.Theoretical and experimental study of MHD(magnetohydrodynamic)micropump[J].Sensors and Actuators,2000,80(80):84-89[16] Bohm S,Burger G J,Korthorst M T.A micromachined silicon valve driven by a miniaturebistable electro-magnetic actuator[J].Sensors and Actuators,2000,80:77-83[17] Mguyen N T,White R M.Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation[J].Sensors and Actuators,1999,77:229-236[18] F C M Van de Pol,et al.Piezoelectric Micropump based on micromachine of silicon[J].Sensors and Actuators,1988,15:153-167[19] Shoji S,et al.Micropump and sample-injector for integrated chemical analyzing systems[J].Sensors and Actuators,1990,A21-23:198-202[20] F C M Van de Pol,et al.Thermo-pneumatic Micro-pump Based on Micro-Engineering Techniques[J].Sensors and Actuators,1990,A21-23:160-164[21] Zengerle R,Richter A,et al.[A],1992:19-24[22] Stemme Erik,Steme Goran.A valveless diffuse/nozzle-based fluid pump[J].Sensors and Actuators,1993,A39:159-167[23] Rapp R,et al.LIGA micro-pump for gases and liquid[J].Sensors and Actuators,1994,A40:57-61
