Abstract：A new type of logarithmic spiral pipe structure was presented to improve the characteristics of flow resistance in tubes to enhance the performance of the micropump. It is a kind of three-way tube consisting of the converging tube which was traditional diffuser/nozzle elements and the branch tube with the outline of logarithmic spiral. Orthogonal optimization was carried out on converging and branch tubes using the method of numerical simulation to optimize the structure. The results of the numerical simulation were supported by experimental data and the errors were within 20% and 12% respectively for the forward and reverse direction. The findings indicated that the ratio of the resistance through opposite directions of this new pipe was approximately a constant 1.7, which was better than the traditional diffuser/nozzle elements. The micropump with the logarithmic spiral pipe was fabricated and tested. The experimental findings showed that the head and the flow rate had peaks at 225 Hz of frequency and increased with the input voltage amplitude. The micropump could reach the maximum head of 396 mm water column and flow rate of 0.43 mL/min. This new logarithmic spiral pipe can effectively improve the performance of valveless piezoelectric micropump.
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