Experiment on anisotropic wet etching characteristics of sapphire

ZHANG Hui, XING Yan

Journal of Jiangsu University(Natural Science Edition) ›› 2020, Vol. 41 ›› Issue (5) : 530-534.

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Journal of Jiangsu University(Natural Science Edition) ›› 2020, Vol. 41 ›› Issue (5) : 530-534. DOI: 10.3969/j.issn.1671-7775.2020.05.006

Experiment on anisotropic wet etching characteristics of sapphire

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 41(5): 530-534 https://doi.org/10.3969/j.issn.1671-7775.2020.05.006

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