硅烷对纳米硅薄膜微结构和光学性能的影响
丁建宁, 高晓妮, 袁宁一, 程广贵, 郭立强
Influence of silane content on micro-structure and optical property of nc-Si：H films
Ding Jianning, Gao Xiaoni, Yuan Ningyi, Cheng Guanggui, Guo Liqiang
江苏大学学报自然科学版
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2010, (3): 300
-303
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DOI: 10.3969/j.issn.1671-7775.2010.03.0012
