刻蚀条件对石英各向异性刻蚀特征的作用机理及KMC数值模拟
张辉1,2, 满青珊1, 贲伟1, 鲁士仿1, 秦晅1, 幸研2
Effect of etching conditions on anisotropic etch rates of quartz and KMC simulation
ZHANG Hui1,2, MAN Qingshan1, BEN Wei1, LU Shifang1, QIN Xuan1, XING Yan2
江苏大学学报自然科学版
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2020, (2): 221
-229
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DOI: 10.3969/j.issn.1671-7775.2020.02.016
