Mathematics Model and Numerical Analysis of the MOCVD Reactor

CHEN Yan, WANG Zhen-tao, LUO Ti-qian

Journal of Drainage and Irrigation Machinery Engineering ›› 2004, Vol. 22 ›› Issue (4) : 39-41.

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Journal of Drainage and Irrigation Machinery Engineering ›› 2004, Vol. 22 ›› Issue (4) : 39-41. DOI: 10.3969/j.issn.1674-8530.2004.04.013
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Mathematics Model and Numerical Analysis of the MOCVD Reactor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2004, 22(4): 39-41 https://doi.org/10.3969/j.issn.1674-8530.2004.04.013

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