Laser micro shock processing experiment of nanometer copper thin films prepared by magnetron sputtering
1.School of Material Science and Engineering, Jiangsu University， Zhenjiang， Jiangsu 212013, China； 2.School of Mechanical Enginee-ring, Jiangsu University， Zhenjiang， Jiangsu 212013, China
Abstract：Laser shock processing was used to treat nanometer copper thin films at different magnetron sputtering parameters. The hardness, elastic modulus and surface topography of the films were determined and analyzed. The results indicate that after laser shock processing, nanometer crystals on the surface of copper thin film present obvious plastic deformation from SEM image. The tiny vacancy at the grain boundary are filled with flat and dense surface, and the size of crystals is increased after treatment. Nanoindentation tests were conducted on different sample sets at shock area and untreated area. The samples were treated at different condition to give different changes of mechanical properties. The minimum change of film hardness is 38.84%, and the maximum change of that reaches 106.58%. The minimum change of film elastic modulus is 14.62% with maximum change of 134.82%.
2013, Vol. 34 
