Abstract:In order to study ultrafast thermalization dynamics of short-pulsed laser irradiated metal, Cu films were deposited on glass substrates by magnetron sputtering, and some samples were annealed at different temperatures. The transient reflectivity of films was detected by femtosecond laser pump-probe, and the influence of annealing on transient reflectivity was also discussed. The results show that the transient reflectivity curve of Cu films can be divided into four stages of stable state, rapid increase, attenuation and recover. The peak value and the delay time of attenuation stage of transient reflectivity curve are sensitive to annealing. With increased annealing temperature, the attenuation stage time is increased with decreased peak value, which means the cooling rate is slow. The predicted electron temperature based on twotemperature model is consistent with experimental data, but the predicted electron cooling time is longer than that of experiment.