Adhesion and friction properties of GeSbTe phase change films prepared by magnetron sputtering
1.Micro／Nano Science ＆ Technology Center, Jiangsu University, Zhenjiang, Jiangsu 212013, China; 2.State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China
Abstract：The GeSbTe films were prepared with different RF magnetron sputtering time at room temperature. The surface topography, thickness, adhesion and friction properties of films were investigated by atomic force microscopy(AFM), Talystep and TriboIndenter nanomechanical test system. The results show that the surface roughness decreases with the increasing of sputtering time, while the thickness and quality increase. The tip diameter(TD), relative humidity(RH),normal load(NL) applied the tip are important factors on adhesion and friction properties of films. The adhesion and friction between the tip and GeSbTe films can be reduced obviously by the decreasing of TD and RH. The frictional performance can be improved by enhancing surface quality and choosing appropriate NL on the tip.
2012, Vol. 33 
