Design of thin film resistivity measurement system based on virtual instrumentation technology
1. School of Mechanical Engineering, Jiangsu University, Zhenjirmg, Jiangsu 212013, China; 2. Center of Micrn-Nano Science and Technology, Jiangsu University, Zhenjiang, Jiangsu 212013, China; 3. Center of Low-dimensional Materials, Micro-Nano Devices and System, Jiangsu Polytechnic University, Changzhou, Jiangsu 213164, China）
Abstract：Thin film resistivity measurement system was designed based on the virtual instrumentation technology and Rymaszewski dual electro-measurement with four-point probes. Interface circuit based on CD4052 chip was designed to realize automatic switching of current probes and voltage probes under the control of virtual instrumentation software, LabVIEW and digital output module hardware, NI 9401. Keithley 2400 sourcemeter under control of LabVIEW program was used for two times voltage measurement, and then van der Pauw correction factor and sheet resistance were calculated by LabVIEW program based on results of voltage measurement. Finally, thin film resistivity was automatically measured, recorded and displayed. The results of experiments show that the proposed system can meet the needs of thin film resistivity automatic measurement, the measurement process for thin film resistivity can be simplified and the level of measurement accuracy and automation can be improved.
潘海彬, 丁建宁, 李伯全, 罗开玉, 王小飞. 基于虚拟仪器的薄膜电阻率测量系统设计[J]. 江苏大学学报（自然科学版）, 2010, 31(4): 447-451.
Pan Haibin, Ding Jianning, Li Boquan, Luo Kaiyu, Wang Xiaofei. Design of thin film resistivity measurement system based on virtual instrumentation technology[J]. Journal of Jiangsu University(Natural Science Eidtion)
, 2010, 31(4): 447-451.
2010, Vol. 31 
