%A WANG Xiu-hong %T Development in Micropump %0 Journal Article %D 2003 %J Journal of Drainage and Irrigation Machinery Engin %R 10.3969/j.issn.1674-8530.2003.01.002 %P 5-8 %V 21 %N 1 %U {http://zzs.ujs.edu.cn/pgjx/CN/abstract/article_958.shtml} %8 2003-01-25 %X The latest development in Micropump is introduced,which includes bothvalve and valveless type of micropump, such as piezoelectric micropump,static electricmicropump, double metal micropump, shape-memorized alloy film micropump, EHD micropump,thermo-pneumatic micropump, viscidity-based micropump, double-filmed micropump, magnetohydro dynamic(MHD) micropump and so on. The structure, mechanism and application areprovided. In the end the prospect of micropump is predicted.