Abstract The fluidstructure interaction (FSI) method was adopted to simulate the fluid flow in a valveless piezoelectric pump with threeway diffuser/nozzle tube, and then a comparison is made with the experiment results. As the 100 V excitation voltage is applied, the flow rate increases against increasing frequency (50~175 Hz); the maximum error of flow rate between FSI computation and experiment is 12%. At the frequency of 100 Hz the flow rate increases with voltage linearly. The experimental data confirmed such computed results, suggesting the FSI simulation method is feasible for this micropump. Moreover a parallel doublechamber valveless piezoelectric micropump with threeway diffuser/nozzle tube was designed to improve output flow rate and pressure of the traditional single chamber valveless piezoelectric pump. Effects of difference in phase of the two vibrators on flow rate in the doublechamber micropump were analyzed by the FSI method, and the transient flow rate plots in one circle were established under various differences of phase, eventually compared with those of the singlechamber pump. The results indicated the flow rate shows a little change with difference of phase in the parallel doublechamber micropump. However, a continuous fluid transport was realized in the doublechamber pump in one cycle, for example,as the difference of phase is 180°,the flow rate is 0367 mL/min, and as the difference of phase is 360°, the flow rate is 0.349 mL/min.
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