Abstract The laser surface texturing on the SiC mechanical seal samples were studied by using a Qswitched diodepumped Nd:YAG laser and the laser processing technique called “single pulse at a time, repeated at intervals”， and the geometric parameters of texture were measured by means of WykoNT1100 surface profiler, further the effect of laser processing parameters (pumping current, repetition frequency, number of excitations, scanning speed) on the geometrical parameters and quality of microtextures was analyzed. The results show that pumping current and number of excitations have an evident influence on the micropore processing quality, and repetition frequency is relatively small. However,pumping current, scanning speed and repetition frequency can greatly affect microgroove processing quality. High quality microtextures can be obtained via optimizing the laser processing parameters. For processing microdimple, the optimal laser parameters, such as pumping current and number of excitations are 14-16 A, 1-10, for processing microgroove. However, the optimal pumping current, repetition frequency and scanning speed are 14-16 A, 1 500-2 500 Hz and 8-25 mm/s, respectively.
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