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| Progress on piezoelectric micropump based on MEMS |
| HE Xiu-hua, ZHANG Rui, JIANG Quan-ying |
| School of Energy and Power Engineering, Jiangsu University, Zhenjiang, jiangsu 212013, China |
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Abstract Piezoelectric micropumps for MEMS have actuator parts,working parts and control parts,which are all integrated together.The actuator parts are made of piezocrystal.Piezoelectric micropumps are classified as piezoelectric membrane micropumps and piezoelectric supersonic ones according to different working principles and structure differences.In this article,both single-chamber piezoelectric micropumps and multi-chamber ones are introduced.Piezoelectric micropumps are widely used in the places of micro-flow control due to the advantages of its small size,simple structure and quick response etc.The authors not only introduce the recent research advances at home and abroad,but also point out the main subjects in future research of piezoelectric micropumps.
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Received: 08 August 2013
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