A theoretical analysis model was developed to study mechanical seals with regular micro surface structure considering cavitation within the fluid film between two faces and the interaction between hydrodynamic and hydrostatic components. Multi grid method was used to study the effect of geometric parameters of dimples which in the form of spherical shape on the seal performance such as opening force, friction torque and fluid film stiffness for various seal parameters. The results show that the seal factor and the ratio of depth/diameter of dimple have significant effect on the seal performance. Opening force and fluid film stiffness increase as the seal factor increases, there have optimum values for the ratio of depth/diameter of dimple to maximize the opening force and fluid film stiffness respectively, and as the seal factor increases the optimum value of ratio of depth/diameter decreases. Area density of dimple has little effect on the seal performance, there have optimum values for the area density of dimple to maximize the opening force and fluid film stiffness respectively, and the seal parameter has not effect on the optimum value of area density.
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